Model(FOXIN) | FOXIN-PVD-0708 | FOXIN-PVD-0809 | FOXIN-PVD-0910 | FOXIN-PVD-1012 | FOXIN-PVD-1212 | FOXIN-PVD-1215 |
Vacuum Chamber Size(mm) | Ф700×H800mm | Ф800×H900mm | Ф900×H1000mm | Ф1000×H1200mm | Ф1200×H1200mm | Ф1200×H1500mm |
Industry |
Watch industry, 3C industry, hardware industry, precision mold industry, tool industry, etc |
Product |
Case watchband, drill, hard alloy, milling cutter, punching rod standard parts die, forming die, etc |
Coating Film Type |
Titanium nitride , Titanium nitride carbide, Zirconium nitride , Chromium nitride , Titanium aluminum nitride ,Titanium carbide |
Vacuum System |
The vertical front door structure is equipped with air pumping system and water cooling system |
Vacuum Measurement |
Maintenance pump + mechanical pump + Roots pump + diffusion pump or molecular pump (specific models can be configured according to customer requirements) |
Vacuum measuring system |
One Pilani (MKS) One cold cathode (MKS) One thin film gauge (MKS) |
Supply Type |
Dc power supply, intermediate frequency power supply, pulse power supply (bias power supply, arc power supply) |
Ultimate Pressure |
No-load cold state 1.0-6.0 ×10-4Pa |
Arc Source | 6set-8set | 6set-8set | 8set-12set | 8set-12set | 10set-14set | 10set-14set |
Arc Source | 200A-300A | 200A-300A | 200A-300A | 200A-300A | 200A-300A | 200A-300A |
Bias Power Supply | 20KW/1set | 20KW/1set | 20KW/1set | 30KW/1set | 30KW/1set | 30KW/1set |
Magnetron power Supply | 1set-2set | 1set-2set | 2set-3set | 2set-3set | 2set-3set | 2set-3set |
Rotation |
Multi-axis planetary male rotation, frequency control (controllable and adjustable) |
Baking Temperature |
Controllable and adjustable from -300℃ to 450℃ to 600℃ (PID temperature control) |
Gas |
The flow control and display system of 3-channel or 4-channel process gas is equipped with automatic gas filling system |
Gas |
Argon, nitrogen, oxygen, acetylene, etc |
Cooling Method |
Water cooling cycle, with industrial cooling tower or industrial chiller (chiller) or cryogenic system. (Provided by customer) |
Mode of control |
PLC+ touch screen operation or computer control, manual, semi-automatic, automatic mode, |
Supply Index |
Air pressure 0.5-0.8MPa, water temperature ≤25℃, water pressure ≥0.2MPa, |
Warning |
Alarm the abnormal situation such as water shortage, overvoltage and undervoltage, circuit break, etc. of pump and target, and implement corresponding protection measures and electrical interlocking function. |
Total Power | 25~65KW | 45~85KW | 65~105KW | 85~115KW | 95~125KW | 100~130KW |
Output Frequency |
Voltage 380V±5%, frequency 50Hz (according to the customer's national electricity standard configuration) |
Occupation Space | 15~50m² | 15~50m² | 25~55m² | 25~55m² | 35~55m² | 35~55m² |
Remark |
Non-standard equipment can be designed and manufactured according to user requirements, and magnetron sputtering target and intermediate frequency twin pair target can be installed. |